Element	Product name	Application
Al	TMA	Capacitor/gate high-k
	DMEAA , MPA , DMAH	Interconnection metal
C	1-hexene	Hard mask ACL
Co	CCTBA , CpCo(CO)2	Contact metal
Hf	TEMAHf , CpHf , Hf(OtBu)4	Capacitor/gate high-k
Ni	NiEtCp2	Contact metal
Ru	RuEtCp2	Capacitor electrode, barrier metal
Si	DIPAS , BDEAS	DPT ULTO, gap fill Sio2, gate SIO2/SiN
	Tri-DMAS	Gate SIO2/SiN, gap fill SiO2
	BTBAS	Gate SIO2/SiN
	HCDS	DPT ULTO
	3TMS , 4TMS	Hard mask SiON
Ta	TBTDETa , TBTEMTa , CpTa	Gate high-k barrier metal
Ti	Cp*Ti(OMe)3	Capacitor high-k
	TiCl4	Capacitor electrode, barrier metal
	TDMAT	Capacitor electrode, barrier metal
W	TBDMW	Contact metal
Zr	TEMAZr , CpZr	Capacitor/gate high-k

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