제품정보 - 용도 구분
| Application | Product name |
|---|---|
| Capacitor high-k | TEMAZr , CpZr , TEMAHf , CpHf , TMA , Cp*Ti(OMe)3 |
| Metal gate high-k | TEMAZr , CpZr , TEMAHf , CpHf , Hf(OtBu)4 , TBTDETa |
| DPT ULTO | DIPAS , BDEAS , HCDS |
| Gap fill SiO2 | Tri-DMAS , DIPAS , BDEAS |
| Gate SiO2/SiN | Tri-DMAS , BTBAS , DIPAS , BDEAS |
| Capacitor electrode | TiCl4 , TDMAT , RuEtCp2 |
| Barrier metal | TiCl4 , TDMAT , TBTDETa , TBTEMTa , CpTa , RuEtCp2 |
| Interconnection metal | DMEAA , MPA , DMAH |
| Contact metal | CCTBA , CpCo(CO)2 , TBDMW , NiEtCp2 |
| DPT Hard mask SiON | 3TMS , 4TMS |
| DPT Hard mask ACL | 1-hexene |
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